Method for obtaining improved feedforward data, a lithographic apparatus for carrying out the method and a device manufacturing method

Method for obtaining improved feedforward data, a lithographic apparatus for carrying out the method and a device manufacturing method

A method of obtaining improved feedforward data for a feedforward control system to move a component through a setpoint profile is presented. The setpoint profile includes a plurality of target states of the component each to be substantially attained at one of a corresponding sequence of target tim...

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1. Verfasser: Heertjes, Marcel François
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creator Heertjes, Marcel François
description A method of obtaining improved feedforward data for a feedforward control system to move a component through a setpoint profile is presented. The setpoint profile includes a plurality of target states of the component each to be substantially attained at one of a corresponding sequence of target times. The method includes moving the component with the feedforward control system according to the setpoint profile using a first set of feedforward data; measuring a state of the component at a plurality of times during the movement; comparing the measured states with corresponding target states defined by the setpoint profile to obtain a set of errors; filtering the set of errors with a non-linear filter; generating improved feedforward data based on the filtered errors, the improved feedforward data being usable by the feedforward control system to move the component more accurately through the setpoint profile.
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title Method for obtaining improved feedforward data, a lithographic apparatus for carrying out the method and a device manufacturing method
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