Method and system for the examination of specimen

Method and system for the examination of specimen

The present invention provides, according to a first aspect, a method for the examination of specimen with a beam of charged particles. The method provides one or more images of the specimen made with different view angles, so that, compared to a single image of the specimen, a lot of additional inf...

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Hauptverfasser: Goldenshtein, Alex, Ben-Av, Radel, Pearl, Asher, Petrov, Igor, Haas, Nadav, Adamec, Pavel, Gold, Yaron
Format: Patent
Sprache:eng
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creator Goldenshtein, Alex
Ben-Av, Radel
Pearl, Asher
Petrov, Igor
Haas, Nadav
Adamec, Pavel
Gold, Yaron
description The present invention provides, according to a first aspect, a method for the examination of specimen with a beam of charged particles. The method provides one or more images of the specimen made with different view angles, so that, compared to a single image of the specimen, a lot of additional information about the specimen can be accessed. The different view angles (angles of incidence) are achieved by tilting the beam between the two images and moving the specimen to a new position so that the displacement of the beam caused by the tilting of the beam is compensated. Accordingly, while displaying/recording the second image the beam scans over the same area as it has scanned while displaying/recording the first image.
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title Method and system for the examination of specimen
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