Stage mechanism, electron microscope having the stage mechanism and method of controlling positioning of stage mechanism

An electron microscope stage mechanism capable of performing high-accuracy positioning while limiting vibration and drift. An ultrasonic motor is used in a stage drive mechanism, and a fixing mechanism capable of increasing stop stiffness is combined integrally with the motor. That is, a structure i...

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Bibliographische Detailangaben

Hauptverfasser:	Seya, Eiichi, Nagamatsu, Takashi
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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