Member having antireflection structure

Member having antireflection structure

A reflection of unnecessary light, which should be prevented, can be suppressed, and occurrence of stray light can be reduced using a member having an antireflection structure, comprising a plate-like portion , and an aperture portion formed in the plate-like portion , wherein the antireflection str...

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Hauptverfasser: Yoshikawa, Motonobu, Yoshitsugu, Keiki, Okayama, Hiroaki, Yamamoto, Yoshiharu, Boku, Kazutake
Format: Patent
Sprache:eng
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creator Yoshikawa, Motonobu
Yoshitsugu, Keiki
Okayama, Hiroaki
Yamamoto, Yoshiharu
Boku, Kazutake
description A reflection of unnecessary light, which should be prevented, can be suppressed, and occurrence of stray light can be reduced using a member having an antireflection structure, comprising a plate-like portion , and an aperture portion formed in the plate-like portion , wherein the antireflection structure having an aspect ratio of or more and comprising structural elements arranged in an array form at a period smaller than the shortest wavelength of light, the reflection of which should be prevented, is formed on an inner wall of the aperture portion
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title Member having antireflection structure
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