Method and system for determining dimensions of a structure having a re-entrant profile

Methods and systems for determining dimensions of a structure that has a re-entrant profile are disclosed. A method includes imaging at least a portion of a top surface of the structure. Subsequently, a second portion of the structure is imaged from a plurality of perspectives. A third portion of th...

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Bibliographische Detailangaben
1. Verfasser: Hwu, Justin Jia-Jen
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
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