Replacement apparatus for an optical element
A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.
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| creator | Kugler, Jens Sorg, Franz Wurmbrand, Andreas Schletterer, Thomas Ittner, Thomas |
| description | A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same. |
| format | Patent |
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| recordid | cdi_uspatents_grants_07768723 |
| source | USPTO Issued Patents |
| title | Replacement apparatus for an optical element |
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