Method of separating plate member
A method which is capable of completely separating a plate member with a large area without using a peeling member and eliminating a possibility of permanent deformation on the plate member. A plurality of suction pads are suckingly disposed on a surface of a topmost plate member in a substantially...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A method which is capable of completely separating a plate member with a large area without using a peeling member and eliminating a possibility of permanent deformation on the plate member. A plurality of suction pads are suckingly disposed on a surface of a topmost plate member in a substantially lattice shape. Then, while the topmost plate member is held by the suction pads disposed in a zigzag shape among the suction pads disposed in the substantially lattice shape, the topmost plate member is lifted by the remaining suction pads. Finally, the suction pads holding the topmost plate member are lifted. |
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