Use of chained implants in solar cells

The manufacture of solar cells is simplified and cost reduced through by performing successive ion implants, without an intervening thermal cycle. In addition to reducing process time, the use of chained ion implantations may also improve the performance of the solar cell. In another embodiment, two...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Bateman, Nicholas, Gupta, Atul, Sullivan, Paul, Murphy, Paul
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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