Use of chained implants in solar cells

The manufacture of solar cells is simplified and cost reduced through by performing successive ion implants, without an intervening thermal cycle. In addition to reducing process time, the use of chained ion implantations may also improve the performance of the solar cell. In another embodiment, two...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Bateman, Nicholas, Gupta, Atul, Sullivan, Paul, Murphy, Paul
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator Bateman, Nicholas
Gupta, Atul
Sullivan, Paul
Murphy, Paul
description The manufacture of solar cells is simplified and cost reduced through by performing successive ion implants, without an intervening thermal cycle. In addition to reducing process time, the use of chained ion implantations may also improve the performance of the solar cell. In another embodiment, two different species are successively implanted without breaking vacuum. In another embodiment, the substrate is implanted, then flipped such that it can be and implanted on both sides before being annealed. In yet another embodiment, one or more different masks are applied and successive implantations are performed without breaking the vacuum condition, thereby reducing the process time.
format Patent
fullrecord <record><control><sourceid>uspatents_EFH</sourceid><recordid>TN_cdi_uspatents_grants_07727866</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>07727866</sourcerecordid><originalsourceid>FETCH-uspatents_grants_077278663</originalsourceid><addsrcrecordid>eNrjZFALLU5VyE9TSM5IzMxLTVHIzC3IScwrKVbIzFMozs9JLFJITs3JKeZhYE1LzClO5YXS3AwKbq4hzh66pcUFiSWpQA3x6UUgffEG5uZG5hZmZsZEKAEAGbYoEg</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Use of chained implants in solar cells</title><source>USPTO Issued Patents</source><creator>Bateman, Nicholas ; Gupta, Atul ; Sullivan, Paul ; Murphy, Paul</creator><creatorcontrib>Bateman, Nicholas ; Gupta, Atul ; Sullivan, Paul ; Murphy, Paul ; Varian Semiconductor Equipment Associates, Inc</creatorcontrib><description>The manufacture of solar cells is simplified and cost reduced through by performing successive ion implants, without an intervening thermal cycle. In addition to reducing process time, the use of chained ion implantations may also improve the performance of the solar cell. In another embodiment, two different species are successively implanted without breaking vacuum. In another embodiment, the substrate is implanted, then flipped such that it can be and implanted on both sides before being annealed. In yet another embodiment, one or more different masks are applied and successive implantations are performed without breaking the vacuum condition, thereby reducing the process time.</description><language>eng</language><creationdate>2010</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7727866$$EPDF$$P50$$Guspatents$$Hfree_for_read</linktopdf><link.rule.ids>230,308,777,799,882,64018</link.rule.ids><linktorsrc>$$Uhttps://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7727866$$EView_record_in_USPTO$$FView_record_in_$$GUSPTO$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Bateman, Nicholas</creatorcontrib><creatorcontrib>Gupta, Atul</creatorcontrib><creatorcontrib>Sullivan, Paul</creatorcontrib><creatorcontrib>Murphy, Paul</creatorcontrib><creatorcontrib>Varian Semiconductor Equipment Associates, Inc</creatorcontrib><title>Use of chained implants in solar cells</title><description>The manufacture of solar cells is simplified and cost reduced through by performing successive ion implants, without an intervening thermal cycle. In addition to reducing process time, the use of chained ion implantations may also improve the performance of the solar cell. In another embodiment, two different species are successively implanted without breaking vacuum. In another embodiment, the substrate is implanted, then flipped such that it can be and implanted on both sides before being annealed. In yet another embodiment, one or more different masks are applied and successive implantations are performed without breaking the vacuum condition, thereby reducing the process time.</description><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2010</creationdate><recordtype>patent</recordtype><sourceid>EFH</sourceid><recordid>eNrjZFALLU5VyE9TSM5IzMxLTVHIzC3IScwrKVbIzFMozs9JLFJITs3JKeZhYE1LzClO5YXS3AwKbq4hzh66pcUFiSWpQA3x6UUgffEG5uZG5hZmZsZEKAEAGbYoEg</recordid><startdate>20100601</startdate><enddate>20100601</enddate><creator>Bateman, Nicholas</creator><creator>Gupta, Atul</creator><creator>Sullivan, Paul</creator><creator>Murphy, Paul</creator><scope>EFH</scope></search><sort><creationdate>20100601</creationdate><title>Use of chained implants in solar cells</title><author>Bateman, Nicholas ; Gupta, Atul ; Sullivan, Paul ; Murphy, Paul</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-uspatents_grants_077278663</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2010</creationdate><toplevel>online_resources</toplevel><creatorcontrib>Bateman, Nicholas</creatorcontrib><creatorcontrib>Gupta, Atul</creatorcontrib><creatorcontrib>Sullivan, Paul</creatorcontrib><creatorcontrib>Murphy, Paul</creatorcontrib><creatorcontrib>Varian Semiconductor Equipment Associates, Inc</creatorcontrib><collection>USPTO Issued Patents</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Bateman, Nicholas</au><au>Gupta, Atul</au><au>Sullivan, Paul</au><au>Murphy, Paul</au><aucorp>Varian Semiconductor Equipment Associates, Inc</aucorp><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Use of chained implants in solar cells</title><date>2010-06-01</date><risdate>2010</risdate><abstract>The manufacture of solar cells is simplified and cost reduced through by performing successive ion implants, without an intervening thermal cycle. In addition to reducing process time, the use of chained ion implantations may also improve the performance of the solar cell. In another embodiment, two different species are successively implanted without breaking vacuum. In another embodiment, the substrate is implanted, then flipped such that it can be and implanted on both sides before being annealed. In yet another embodiment, one or more different masks are applied and successive implantations are performed without breaking the vacuum condition, thereby reducing the process time.</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng
recordid cdi_uspatents_grants_07727866
source USPTO Issued Patents
title Use of chained implants in solar cells
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-19T12%3A15%3A30IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-uspatents_EFH&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Bateman,%20Nicholas&rft.aucorp=Varian%20Semiconductor%20Equipment%20Associates,%20Inc&rft.date=2010-06-01&rft_id=info:doi/&rft_dat=%3Cuspatents_EFH%3E07727866%3C/uspatents_EFH%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true