Device for holding a template for use in imprint lithography

Described are imprint lithography templates, methods of forming and using the templates, and a template holder device. An imprint lithography template may include a body with a plurality of recesses on a surface of the body. The body may be of a material that is substantially transparent to activati...

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Bibliographische Detailangaben

Hauptverfasser:	Bailey, Todd C, Choi, Byung-Jin, Colburn, Matthew E, Sreenivasan, Sidlgata V, Willson, Carlton G, Ekerdt, John G
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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