Restricted radiated heating assembly for high temperature processing

Restricted radiated heating assembly for high temperature processing

A vapor deposition reactor and associated method are disclosed that increase the lifetime and productivity of a filament-based resistive-heated vapor deposition system. The reactor and method provide for heating the filament while permitting the filament to move as it expands under the effect of inc...

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Hauptverfasser: Emerson, David Todd, Garner, Robert Allen, Bergmann, Michael John, Brown, Keenan Carlyle, Pennington, Michael Allen, Coleman, Thomas Goldthwaite
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Sprache:eng
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creator Emerson, David Todd
Garner, Robert Allen
Bergmann, Michael John
Brown, Keenan Carlyle
Pennington, Michael Allen
Coleman, Thomas Goldthwaite
description A vapor deposition reactor and associated method are disclosed that increase the lifetime and productivity of a filament-based resistive-heated vapor deposition system. The reactor and method provide for heating the filament while permitting the filament to move as it expands under the effect of increasing temperature while limiting the expanding movement of the filament to an amount that prevents the expanding movement of the filament from creating undesired contact with any portions of the reactor.
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title Restricted radiated heating assembly for high temperature processing
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