Method of washing a polished object

Method of washing a polished object

2233422 322An abrasive includes abrasive grains, a solvent, and an additive. MnO, MnO, MnO, MnO or a mixture thereof as the abrasive grains, HOas the solvent, and HNO, an organic acid, HO, etc., as the additive are employed. The abrasive is solidified with cooling, etc. The abrasive and the additive...

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1. Verfasser: Kishii, Sadahiro
Format: Patent
Sprache:eng
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Zusammenfassung:2233422 322An abrasive includes abrasive grains, a solvent, and an additive. MnO, MnO, MnO, MnO or a mixture thereof as the abrasive grains, HOas the solvent, and HNO, an organic acid, HO, etc., as the additive are employed. The abrasive is solidified with cooling, etc. The abrasive and the additive can be supplied to a polishing apparatus through separate routes.