Diaphragm pressure measuring cell arrangement

Diaphragm pressure measuring cell arrangement

A diaphragm pressure measuring cell arrangement has a housing body at least partly made of sapphire material and a planar sapphire diaphragm with a peripheral edge joined by a first edge seal to the housing body to form a reference vacuum chamber. An outer surface of the diaphragm is exposed to a me...

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Hauptverfasser: Berner, Walter Christian, Antila, Jarkko, Duplain, Gaétan, Björkman, Per, Manselin, Tove, Untermarzoner, Oskar
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Sprache:eng
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creator Berner, Walter Christian
Antila, Jarkko
Duplain, Gaétan
Björkman, Per
Manselin, Tove
Untermarzoner, Oskar
description A diaphragm pressure measuring cell arrangement has a housing body at least partly made of sapphire material and a planar sapphire diaphragm with a peripheral edge joined by a first edge seal to the housing body to form a reference vacuum chamber. An outer surface of the diaphragm is exposed to a medium to be measured. A ceramic supporting body is attached to the back side of the housing body by sealing glass and includes a surface area overhanging that surrounds the housing body to form a first sealing surface. A tubular sensor casing incorporates the measuring cell for mounted the ceramic support body, the casing including an inside second surrounding sealing surface corresponding to the first sealing surface. A metal ring seal is between the sealing surfaces and a pressing member presses sealing surfaces together.
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title Diaphragm pressure measuring cell arrangement
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