Wafer, semiconductor chip, and semiconductor device

Scribe lines demarcating semiconductor chips comprise, in both the vertical direction and the horizontal direction, first-type scribe lines of the minimum width enabling cutting by dicing or other means, and second-type scribe lines enabling placement of TEGs, alignment marks or other accessories, a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Nishizawa, Kazuyuki
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
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