Heating device for heating semiconductor wafers in thermal processing chambers

An apparatus for heat treating semiconductor wafers is disclosed. The apparatus includes a heating device which contains an assembly of light energy sources for emitting light energy onto a wafer. The light energy sources can be placed in various configurations. In accordance with the present invent...

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Hauptverfasser:	Gat, Arnon, Bogart, Bob
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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