Wafer probe station having a skirting component

A probe station includes a fully guarded chuck assembly and connector mechanism for increasing sensitivity to low-level currents while reducing settling times. The chuck assembly includes a wafer-supporting first chuck element surrounded by a second chuck element having a lower component, skirting c...

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Bibliographische Detailangaben

Hauptverfasser:	Schwindt, Randy J, Harwood, Warren K, Tervo, Paul A, Smith, Kenneth R, Warner, Richard H
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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