Thin film probe card

A thin film probe card includes a plate and a plurality of wires on the plate, each of which is electrically connected with at least a thin film probe. A plurality of elastic members are provided between the probes, which absorbs the force of the probes in the test to protect the probes from wear an...

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Hauptverfasser: Wang, Chih-Yuan, Chang, Heng-Yi
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Sprache:eng
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creator Wang, Chih-Yuan
Chang, Heng-Yi
description A thin film probe card includes a plate and a plurality of wires on the plate, each of which is electrically connected with at least a thin film probe. A plurality of elastic members are provided between the probes, which absorbs the force of the probes in the test to protect the probes from wear and extend the product life of the probe card.
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title Thin film probe card
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