Processing method of thin-film and manufacturing method of thin-film magnetic head

Processing method of thin-film and manufacturing method of thin-film magnetic head

A processing method of a thin-film includes a step of forming a predetermined pattern film or predetermined elements on a substrate or on a film formed in an upstream process, a step of forming a transparent film over the formed predetermined pattern film or predetermined elements, a step of forming...

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Hauptverfasser: Isobe, Mitsuharu, Umehara, Hiromichi, Gomi, Hirotaka, Yokozawa, Tomohide
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Sprache:eng
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creator Isobe, Mitsuharu
Umehara, Hiromichi
Gomi, Hirotaka
Yokozawa, Tomohide
description A processing method of a thin-film includes a step of forming a predetermined pattern film or predetermined elements on a substrate or on a film formed in an upstream process, a step of forming a transparent film over the formed predetermined pattern film or predetermined elements, a step of forming a pattern-transferred film having shapes corresponding to shapes of the formed predetermined pattern film or predetermined elements, on the formed transparent film, and a step of forming an opaque film on the pattern-transferred film.
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title Processing method of thin-film and manufacturing method of thin-film magnetic head
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