Wafer processing apparatus

A wafer processing apparatus, for processing a wafer with a surface protective film attached on the front surface on which at least one circuit pattern is formed, includes a dicing tape application unit for attaching a dicing tape on a frame and the wafer, a surplus dicing tape take-up unit for taki...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Ametani, Minoru
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
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