Automated sputtering target production

A system and method are provided for manufacturing workpieces, such as metal articles like sputtering target, the system comprising: comparing one or more physical or chemical values of a respective one of a plurality of metal target blanks to one or more comparable values of at least one desired cr...

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Bibliographische Detailangaben

Hauptverfasser:	Reed, Wiley Zane, Cosper, Bobby R, Schmidt, Kenneth G, Bultz, Neil D, Wickersham, Charles E, Matera, John P
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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