Detection and characterization of SiCOH-based dielectric materials during device fabrication

Detection and characterization of SiCOH-based dielectric materials during device fabrication

Processes and apparatuses are disclosed for detecting and characterizing SiCOH-based dielectric materials during integrated circuit fabrication. The processes generally include chromatographically analyzing a fluid stream generated during a process employed for device fabrication, e.g., during a wet...

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Hauptverfasser: Balachandran, Manoj, Hagan, James A, Kim, Ben, Persaud, Deoram, Ticknor, Adam D, Tseng, Wei-tsu
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Sprache:eng
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creator Balachandran, Manoj
Hagan, James A
Kim, Ben
Persaud, Deoram
Ticknor, Adam D
Tseng, Wei-tsu
description Processes and apparatuses are disclosed for detecting and characterizing SiCOH-based dielectric materials during integrated circuit fabrication. The processes generally include chromatographically analyzing a fluid stream generated during a process employed for device fabrication, e.g., during a wet strip, a chemical mechanical planarization process and the like.
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title Detection and characterization of SiCOH-based dielectric materials during device fabrication
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