Backfilled, self-assembled monolayers and methods of making same

Backfilled, self-assembled monolayers and methods of making same

Backfilled, self-assembled monolayers and methods of making the same are disclosed. The self-assembled monolayer comprises at least one functional organosilane species and a substantially random dispersion of at least one backfilling organosilane species among the functional organosilane species, wh...

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Hauptverfasser: Fryxell, Glen E, Zemanian, Thomas S, Addleman, R. Shane, Aardahl, Christopher L, Zheng, Feng, Busche, Brad, Egorov, Oleg B
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creator Fryxell, Glen E
Zemanian, Thomas S
Addleman, R. Shane
Aardahl, Christopher L
Zheng, Feng
Busche, Brad
Egorov, Oleg B
description Backfilled, self-assembled monolayers and methods of making the same are disclosed. The self-assembled monolayer comprises at least one functional organosilane species and a substantially random dispersion of at least one backfilling organosilane species among the functional organosilane species, wherein the functional and backfilling organosilane species have been sequentially deposited on a substrate. The method comprises depositing sequentially a first organosilane species followed by a backfilling organosilane species, and employing a relaxation agent before or during deposition of the backfilling organosilane species, wherein the first and backfilling organosilane species are substantially randomly dispersed on a substrate.
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title Backfilled, self-assembled monolayers and methods of making same
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