Transfer device for substrate and storing device and hand therein, and substrate handled by the device
A transfer device for a substrate is capable of preventing deformation or breakage of the substrate due to bending stress by reducing the amount of dead weight deflection of the substrate, e.g. a large mother glass board. Supporting members extend in opposite directions from two sides of a storage d...
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| creator | Chinbe, Hiroshi Endo, Yoshiya Shimakawa, Naoki Fukuwatari, Ichiro Hayashida, Yoshiaki Takakura, Yoshio Matsuyama, Akio Kohketsu, Hideto |
| description | A transfer device for a substrate is capable of preventing deformation or breakage of the substrate due to bending stress by reducing the amount of dead weight deflection of the substrate, e.g. a large mother glass board. Supporting members extend in opposite directions from two sides of a storage device such that the substrate can be introduced or removed by raising and lowering the hand of a transfer machine inserted into the storage device between the supporting members. The supporting members are comprised of a plurality of supporting members in parallel, formed with a gap between the supporting members facing each other. The hand is comprised of a plurality of transverse hand supporting members extending in the direction of breadth, positioned between the parallel supporting members, and a longitudinal hand supporting member extending in the direction of length and positioned between the supporting members facing each other and connecting the transverse hand supporting members at the lifting position of the hand. |
| format | Patent |
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Supporting members extend in opposite directions from two sides of a storage device such that the substrate can be introduced or removed by raising and lowering the hand of a transfer machine inserted into the storage device between the supporting members. The supporting members are comprised of a plurality of supporting members in parallel, formed with a gap between the supporting members facing each other. 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Supporting members extend in opposite directions from two sides of a storage device such that the substrate can be introduced or removed by raising and lowering the hand of a transfer machine inserted into the storage device between the supporting members. The supporting members are comprised of a plurality of supporting members in parallel, formed with a gap between the supporting members facing each other. The hand is comprised of a plurality of transverse hand supporting members extending in the direction of breadth, positioned between the parallel supporting members, and a longitudinal hand supporting member extending in the direction of length and positioned between the supporting members facing each other and connecting the transverse hand supporting members at the lifting position of the hand.</abstract><oa>free_for_read</oa></addata></record> |
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| title | Transfer device for substrate and storing device and hand therein, and substrate handled by the device |
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