Method of making a contact on a backside of a die

A method of forming a semiconductor device includes forming active circuitry over a semiconductor substrate, wherein the semiconductor substrate has a first major surface and a second major surface and the first active circuitry is formed over the first major surface of the semiconductor substrate....

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Sparks, Terry G, Rauf, Shahid
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
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