Solid-state imaging device
A solid-state imaging device including: a plurality of photodiode parts; a plurality of vertical charge transfer parts each of which reads out a signal charge and transfers the signal charge in a vertical direction; and a plurality of shade films that have conductivity, which supplies a transfer pul...
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Sprache: | eng |
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Zusammenfassung: | A solid-state imaging device including: a plurality of photodiode parts; a plurality of vertical charge transfer parts each of which reads out a signal charge and transfers the signal charge in a vertical direction; and a plurality of shade films that have conductivity, which supplies a transfer pulse via the shade film, is used. The vertical charge transfer parts respectively have transfer channels and transfer electrodes. The shade film is formed above the corresponding vertical charge transfer part via an insulation layer that insulates the shade film from the transfer electrodes. The insulation layer has a thick part in a part of the insulation layer where the shade film is overlapped on a side of the photodiode part that is a subject to be read out by the vertical charge transfer part. |
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