Method of vapor-depositing strip-shaped substrates with a transparent barrier layer made of aluminum oxide

Method of vapor-depositing strip-shaped substrates with a transparent barrier layer made of aluminum oxide

The invention relates to a method for vapor-depositing strip-shaped substrates with a transparent barrier layer made of aluminum oxide by reactively vaporizing aluminum and admitting reactive gas in a strip vapor-deposition installation. The invention provides that, before coating with aluminum oxid...

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Hauptverfasser: Schiller, Nicolas, Straach, Steffen, Räbisch, Mathias, Fahland, Matthias, Charton, Christoph
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Sprache:eng
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creator Schiller, Nicolas
Straach, Steffen
Räbisch, Mathias
Fahland, Matthias
Charton, Christoph
description The invention relates to a method for vapor-depositing strip-shaped substrates with a transparent barrier layer made of aluminum oxide by reactively vaporizing aluminum and admitting reactive gas in a strip vapor-deposition installation. The invention provides that, before coating with aluminum oxide, a partially enclosed layer made of a metal or of a metal oxide is applied to the substrate by magnetron sputtering.
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title Method of vapor-depositing strip-shaped substrates with a transparent barrier layer made of aluminum oxide
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