System and method for producing a semiconductor circuit arrangement

Method and systems for producing a semiconductor circuit arrangement are disclosed. In one implementation, after a formation of a first electrically conductive layer at the surface of a semiconductor substrate for the purpose of realizing a base connection layer and a first split gate layer, an impl...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Rochel, Markus, Tilke, Armin, Wagner, Cajetan
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!