Single diaphragm ATF differential pressure transducer

An advanced thick film (ATF) pressure transducer can be produced from an advanced thick film stack on a metallic substrate. The metallic substrate has a flexible metallic diaphragm that flexes when there is a pressure differential across its top and bottom surfaces. The conductive and dielectric lay...

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Bibliographische Detailangaben

Hauptverfasser:	Khemet, Bomani, Ricks, Lamar F, Hoover, William S
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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