Free-form optical surface measuring apparatus and method

A surface measuring apparatus for measuring a surface shape of an element includes a measurement frame having a mount for mounting the element to be measured, a stage including a rotatable device, the stage being movable in at least a first direction relative to the measurement frame, and a contactl...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Henselmans, Rens, Rosielle, Petrus Carolus Johannes Nicolaas
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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