Semiconductor piezoresistive sensor and operation method thereof

A semiconductor piezoresistive sensor, which is electrically connected with a circuit, includes a semiconductor base, at least one piezoresistive element and a conductive layer. The semiconductor base includes a diaphragm and a base. The base is disposed adjacent to and around the diaphragm. The pie...

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Bibliographische Detailangaben

Hauptverfasser:	Hsieh, Hsieh-Shen, Chang, Heng-Chung, Lee, Cheng-Chang, Liang, Chao-Jui, Chen, Huang-Kun, Shing, Tai-Kang
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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