Measuring instrument, in particular for transmission measurement in vacuum system

A measuring instrument, in particular for transmission measurement with transparent substrates, comprises a measuring head with a light emitting element for emitting a light beam and a light receiver element for recording an incident light beam, and a retro-reflector for reflection of the emitted li...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Krause, Jochen, Proehl, Holger
Format: Patent
Sprache:eng
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