Probe station having multiple enclosures

A probe station for probing a test device has a chuck element for supporting the test device. An electrically conductive outer shield enclosure at least partially encloses such chuck element to provide EMI shielding therefor. An electrically conductive inner shield enclosure is interposed between an...

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Bibliographische Detailangaben

Hauptverfasser:	Peters, Ron A, Hayden, Leonard A, Hawkins, Jeffrey A, Dougherty, R. Mark
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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