Method and apparatus for detecting defects

There is disclosed a defect detecting apparatus that focuses a laser beam, irradiates it onto the surface of a sample to be examined, and detects a foreign substance/defect existing on the surface from the scattered light as a result of the irradiation of the beam onto the sample surface. In order t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Ohshima, Yoshimasa, Iwata, Hisafumi, Nakano, Hiroyuki
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!