Use of silyating agents

The present invention provides improvements to the use of silyating agents in semiconductor processing. More particularly, the silyating agents may be provided in combination with a substantially non-flammable ether, so that the combination is substantially non-flammable. Additionally, the silyating...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Clark, Philip G, Christenson, Kurt Karl, Schwab, Brent D
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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