Process module tuning

A process module tuning method characterizes a process module by gathering data using a process condition measuring device to measure process outputs while inputs are excited. The data is used to identify a dynamic process model. The dynamic process model is then be used to determine process input s...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Barnett, Jr, James R, Ekblad, Mark K, Parker, Jeffrey M
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
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