Guard ring for improved matching

A semiconductor manufacturing method comprises forming a leveling guard ring defining an interior area into which are fabricated one or more devices. In certain embodiments two or more matched devices, such as in a common centroid layout, are fabricated in the interior area. The guard ring is formed...

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Bibliographische Detailangaben

Hauptverfasser:	Kerr, Daniel Charles, Luce, Roscoe T, Jamison, Michele Marie, Chen, Alan Sangone, Russell, William A
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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