Pad characterization tool

Tools and methods for in-situ characterizing of a surface of a polishing pad are described. A characterization tool is integrated with polishing tool so that the polishing pad can be monitored in-situ. The characterization tool and the polishing pad can be rotated or moved so that any portion of the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Mavliev, Rashid A, Yavelberg, Simon, Alonzo, Gerald J
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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