Pad characterization tool

Tools and methods for in-situ characterizing of a surface of a polishing pad are described. A characterization tool is integrated with polishing tool so that the polishing pad can be monitored in-situ. The characterization tool and the polishing pad can be rotated or moved so that any portion of the...

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Hauptverfasser:	Mavliev, Rashid A, Yavelberg, Simon, Alonzo, Gerald J
Format:	Patent
Sprache:	eng
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creator	Mavliev, Rashid A Yavelberg, Simon Alonzo, Gerald J
description	Tools and methods for in-situ characterizing of a surface of a polishing pad are described. A characterization tool is integrated with polishing tool so that the polishing pad can be monitored in-situ. The characterization tool and the polishing pad can be rotated or moved so that any portion of the polishing pad can be tested.
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title	Pad characterization tool
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