Micro sample heating apparatus and method of making the same

Micro sample heating apparatus and method of making the same

A micro sample heating apparatus has a substrate, a micro heating device disposed on a first surface of the substrate, a cavity having an inclined sidewall and corresponding to the micro heating device positioned in a second surface of the substrate, and an isolation structure positioned on the seco...

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Hauptverfasser: Pan, Chin-Chang, Kang, Yu-Fu
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description A micro sample heating apparatus has a substrate, a micro heating device disposed on a first surface of the substrate, a cavity having an inclined sidewall and corresponding to the micro heating device positioned in a second surface of the substrate, and an isolation structure positioned on the second surface of the substrate. The isolation structure has an opening corresponding to the cavity, and the cavity and the opening form a sample room.
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title Micro sample heating apparatus and method of making the same
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