Effective method to improve sub-micron color filter sensitivity

An image sensor device and method for forming said device are described. The image sensor structure comprises a substrate with photodiodes, an interconnect structure formed on the substrate, a color filter layer above the interconnect structure, a first microlens array, an overcoat layer, and a seco...

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Hauptverfasser: Weng, Fu-Tien, Hsiao, Yu-Kung, Chang, Chin-Kung, Hsu, Hung-Jen, Dai, Yi-Ming, Kuo, Chin-Chen
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creator Weng, Fu-Tien
Hsiao, Yu-Kung
Chang, Chin-Kung
Hsu, Hung-Jen
Dai, Yi-Ming
Kuo, Chin-Chen
description An image sensor device and method for forming said device are described. The image sensor structure comprises a substrate with photodiodes, an interconnect structure formed on the substrate, a color filter layer above the interconnect structure, a first microlens array, an overcoat layer, and a second microlens array. A key feature is that a second microlens has a larger radius of curvature than a first microlens. Additionally, each first microlens and second microlens is a flat convex lens. Thus, a thicker second microlens with a short focal length is aligned above a thinner first microlens having a long focal length. A light column that includes a first microlens, a second microlens and a color filter region is formed above each photodiode. A second embodiment involves replacing a second microlens in each light column with a plurality of smaller second microlenses that focus light onto a first microlens.
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title Effective method to improve sub-micron color filter sensitivity
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