SRAM cells having inverters and access transistors therein with vertical fin-shaped active regions

Complementary metal oxide semiconductor (CMOS) static random access memory (SRAM) cells include at least a first inverter formed in a fin-shaped pattern of stacked semiconductor regions of opposite conductivity type. In some of these embodiments, the first inverter includes a first conductivity type...

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Hauptverfasser: Huo, Zong-Liang, Baik, Seung-Jae, Yeo, In-Seok, Yoon, Hong-Sik, Kim, Shi-Eun
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creator Huo, Zong-Liang
Baik, Seung-Jae
Yeo, In-Seok
Yoon, Hong-Sik
Kim, Shi-Eun
description Complementary metal oxide semiconductor (CMOS) static random access memory (SRAM) cells include at least a first inverter formed in a fin-shaped pattern of stacked semiconductor regions of opposite conductivity type. In some of these embodiments, the first inverter includes a first conductivity type (e.g., P-type or N-type) MOS load transistor electrically coupled in series with a second conductivity type (e.g., N-type of P-type) MOS driver transistor. The first inverter is arranged so that active regions of the first conductivity type MOS load transistor and the second conductivity type driver transistor are vertically stacked relative to each other within a first portion of a vertical dual-conductivity semiconductor fin structure. This fin structure is surrounded on at least three sides by a wraparound gate electrode, which is configured to modulate conductivity of both the active regions in response to a gate signal.
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fullrecord <record><control><sourceid>uspatents_EFH</sourceid><recordid>TN_cdi_uspatents_grants_07368788</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>07368788</sourcerecordid><originalsourceid>FETCH-uspatents_grants_073687883</originalsourceid><addsrcrecordid>eNqNjEEKwjAQRbNxIeod5gIFoWCzFVHcuFH3MsZpMxCmJTPG65uCB3D14PPeX7rn7bq_QKCUFCIWlgFYCmWjrIDyAgyBVMEyirLaWGeLlIkFPmwRZpcDJuhZGo040dwYF4JMA4-ia7foMSltflw5OB3vh3Pz1gmNxPQx1PeKbdfufOd9-4fyBQJqP0I</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>SRAM cells having inverters and access transistors therein with vertical fin-shaped active regions</title><source>USPTO Issued Patents</source><creator>Huo, Zong-Liang ; Baik, Seung-Jae ; Yeo, In-Seok ; Yoon, Hong-Sik ; Kim, Shi-Eun</creator><creatorcontrib>Huo, Zong-Liang ; Baik, Seung-Jae ; Yeo, In-Seok ; Yoon, Hong-Sik ; Kim, Shi-Eun ; Samsung Electronics Co., Ltd</creatorcontrib><description>Complementary metal oxide semiconductor (CMOS) static random access memory (SRAM) cells include at least a first inverter formed in a fin-shaped pattern of stacked semiconductor regions of opposite conductivity type. In some of these embodiments, the first inverter includes a first conductivity type (e.g., P-type or N-type) MOS load transistor electrically coupled in series with a second conductivity type (e.g., N-type of P-type) MOS driver transistor. The first inverter is arranged so that active regions of the first conductivity type MOS load transistor and the second conductivity type driver transistor are vertically stacked relative to each other within a first portion of a vertical dual-conductivity semiconductor fin structure. This fin structure is surrounded on at least three sides by a wraparound gate electrode, which is configured to modulate conductivity of both the active regions in response to a gate signal.</description><language>eng</language><creationdate>2008</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7368788$$EPDF$$P50$$Guspatents$$Hfree_for_read</linktopdf><link.rule.ids>230,308,776,798,881,64012</link.rule.ids><linktorsrc>$$Uhttps://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7368788$$EView_record_in_USPTO$$FView_record_in_$$GUSPTO$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Huo, Zong-Liang</creatorcontrib><creatorcontrib>Baik, Seung-Jae</creatorcontrib><creatorcontrib>Yeo, In-Seok</creatorcontrib><creatorcontrib>Yoon, Hong-Sik</creatorcontrib><creatorcontrib>Kim, Shi-Eun</creatorcontrib><creatorcontrib>Samsung Electronics Co., Ltd</creatorcontrib><title>SRAM cells having inverters and access transistors therein with vertical fin-shaped active regions</title><description>Complementary metal oxide semiconductor (CMOS) static random access memory (SRAM) cells include at least a first inverter formed in a fin-shaped pattern of stacked semiconductor regions of opposite conductivity type. In some of these embodiments, the first inverter includes a first conductivity type (e.g., P-type or N-type) MOS load transistor electrically coupled in series with a second conductivity type (e.g., N-type of P-type) MOS driver transistor. The first inverter is arranged so that active regions of the first conductivity type MOS load transistor and the second conductivity type driver transistor are vertically stacked relative to each other within a first portion of a vertical dual-conductivity semiconductor fin structure. This fin structure is surrounded on at least three sides by a wraparound gate electrode, which is configured to modulate conductivity of both the active regions in response to a gate signal.</description><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2008</creationdate><recordtype>patent</recordtype><sourceid>EFH</sourceid><recordid>eNqNjEEKwjAQRbNxIeod5gIFoWCzFVHcuFH3MsZpMxCmJTPG65uCB3D14PPeX7rn7bq_QKCUFCIWlgFYCmWjrIDyAgyBVMEyirLaWGeLlIkFPmwRZpcDJuhZGo040dwYF4JMA4-ia7foMSltflw5OB3vh3Pz1gmNxPQx1PeKbdfufOd9-4fyBQJqP0I</recordid><startdate>20080506</startdate><enddate>20080506</enddate><creator>Huo, Zong-Liang</creator><creator>Baik, Seung-Jae</creator><creator>Yeo, In-Seok</creator><creator>Yoon, Hong-Sik</creator><creator>Kim, Shi-Eun</creator><scope>EFH</scope></search><sort><creationdate>20080506</creationdate><title>SRAM cells having inverters and access transistors therein with vertical fin-shaped active regions</title><author>Huo, Zong-Liang ; Baik, Seung-Jae ; Yeo, In-Seok ; Yoon, Hong-Sik ; Kim, Shi-Eun</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-uspatents_grants_073687883</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2008</creationdate><toplevel>online_resources</toplevel><creatorcontrib>Huo, Zong-Liang</creatorcontrib><creatorcontrib>Baik, Seung-Jae</creatorcontrib><creatorcontrib>Yeo, In-Seok</creatorcontrib><creatorcontrib>Yoon, Hong-Sik</creatorcontrib><creatorcontrib>Kim, Shi-Eun</creatorcontrib><creatorcontrib>Samsung Electronics Co., Ltd</creatorcontrib><collection>USPTO Issued Patents</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Huo, Zong-Liang</au><au>Baik, Seung-Jae</au><au>Yeo, In-Seok</au><au>Yoon, Hong-Sik</au><au>Kim, Shi-Eun</au><aucorp>Samsung Electronics Co., Ltd</aucorp><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>SRAM cells having inverters and access transistors therein with vertical fin-shaped active regions</title><date>2008-05-06</date><risdate>2008</risdate><abstract>Complementary metal oxide semiconductor (CMOS) static random access memory (SRAM) cells include at least a first inverter formed in a fin-shaped pattern of stacked semiconductor regions of opposite conductivity type. In some of these embodiments, the first inverter includes a first conductivity type (e.g., P-type or N-type) MOS load transistor electrically coupled in series with a second conductivity type (e.g., N-type of P-type) MOS driver transistor. The first inverter is arranged so that active regions of the first conductivity type MOS load transistor and the second conductivity type driver transistor are vertically stacked relative to each other within a first portion of a vertical dual-conductivity semiconductor fin structure. This fin structure is surrounded on at least three sides by a wraparound gate electrode, which is configured to modulate conductivity of both the active regions in response to a gate signal.</abstract><oa>free_for_read</oa></addata></record>
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title SRAM cells having inverters and access transistors therein with vertical fin-shaped active regions
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-05T06%3A51%3A08IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-uspatents_EFH&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Huo,%20Zong-Liang&rft.aucorp=Samsung%20Electronics%20Co.,%20Ltd&rft.date=2008-05-06&rft_id=info:doi/&rft_dat=%3Cuspatents_EFH%3E07368788%3C/uspatents_EFH%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true