Optical channels for multi-level metal optical imagers and method for manufacturing same

The manufacture of multi-level optical imagers and the resulting imagers are described. Multiple levels of metallization are prepared, each level having a via. The vias are aligned and a material having a higher refractive index than its surrounds is positioned within the vias to form an optical cha...

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Bibliographische Detailangaben

1. Verfasser:	Quinlan, Sion C
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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