Dynamic compensation system for maskless lithography
A method for dynamically registering multiple patterned layers on a substrate comprises: depositing a first layer on the substrate; printing a first pattern on the first layer; depositing a second layer on the first pattern; and printing a second pattern on the second layer while dynamically detecti...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A method for dynamically registering multiple patterned layers on a substrate comprises: depositing a first layer on the substrate; printing a first pattern on the first layer; depositing a second layer on the first pattern; and printing a second pattern on the second layer while dynamically detecting the first pattern to align the second pattern with the first pattern. |
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