Systems and methods for optical measurement

Systems and methods for optical measurement

12A system for measuring optical properties of a sample is provided. A light source provides incident polarized light. A detector detects reflected light from the sample surface. A processor determines a first coefficient (R) of the reflected light detected by the detector, determines a second coeff...

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Hauptverfasser: Liou, Joung-Wei, Huang, Jacky, Ke, Chih-Ming, Wu, Szu-An
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creator Liou, Joung-Wei
Huang, Jacky
Ke, Chih-Ming
Wu, Szu-An
description 12A system for measuring optical properties of a sample is provided. A light source provides incident polarized light. A detector detects reflected light from the sample surface. A processor determines a first coefficient (R) of the reflected light detected by the detector, determines a second coefficient (n), extinction coefficient (k), and thickness of the film based on the measured first coefficient, and determines a first dielectric constant (∈) and a second dielectric constant (∈) of the film according to the second coefficient (n) and extinction coefficient (k).
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title Systems and methods for optical measurement
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