Probe card and method for constructing same

In one embodiment, a probe card for testing dice on a wafer includes a substrate, a number of cantilevers formed on a surface thereof, and a number of probes extending from unsupported ends of the cantilevers. The unsupported ends of the cantilevers project over cavities on the surface of the substr...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Nulty, James E, Hunter, James A, Herrera, Alexander J
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!