Method and apparatus for fault detection classification of multiple tools based upon external data

The present invention is generally directed to various methods and systems for fault detection control of multiple tools based upon external data. In one illustrative embodiment, the method includes monitoring each of a plurality of tools to determine if a fault condition occurs in any of the tools,...

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Bibliographische Detailangaben

Hauptverfasser:	Markle, Richard J, Coss, Jr, Elfido
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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