In-plane mechanically coupled microelectromechanical tuning fork resonators

There are many inventions described and illustrated herein, as well as many aspects and embodiments of those inventions. In one aspect, the present invention is directed to a resonator architecture including a plurality of in-plane vibration microelectromechanical resonators (for example, 2 or 4 res...

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Bibliographische Detailangaben

Hauptverfasser:	Pan, Zhiyu, Candler, Rob Norris, Lutz, Markus, Partridge, Aaron, Materna, Volker, Yama, Gary, Frey, Wilhelm
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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