System and method for simulating an aerial image

Simulated aerial images for an optical system are made by forming a reference aerial image of a first mask used in connection with the optical system, and then capturing and processing the reference aerial image to generate a set of expansion functions representative of the optical system. The expan...

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Bibliographische Detailangaben

1. Verfasser:	Schwarzband, Ishai
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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