Process for treating perfluorides

According to a process for treating perfluorides in which a perfluoride treatment undertaker carries out decomposition treatment of perfluorides discharged from a manufacturing plant by using a perfluoride treating apparatus connected to said manufacturing plant, and the cost of treatment of perfluo...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Tamata, Shin, Yabutani, Takashi
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
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