Job queue management system and method thereof, including clustering wafer lots processed by common recipe into group, and creating process job and control job

A system and method for job queue management. A job queue management apparatus acquires multiple wafer lot records individually regarding a plurality of wafers processed by a recipe, clusters the wafer lots by the common recipe into a group, creates a process job corresponding to the group, and stor...

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Bibliographische Detailangaben

Hauptverfasser:	You, James, Jang, Shen-Jr, Sun, King-Chuan
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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